ROD Stocker
ROD Stocker(Wafering Fab) Introduction
A stocker system used in the semiconductor wafer manufacturing process to store rods (RODs) cut from ingots, utilizing dedicated pallets for rod handling.
Features and Benefits
Compact Footprint
Minimized dead space and full use of vertical space.
Standards
Compliance with current SEMI standards ensures interoperation with other cleanroom equipment.
Communication
SECS / HSMS / GEM compatible
