Semiconductor Stocker

   Due to the reason of 300mm Semiconductor fab being complicated and performed with repetitive processes, Ample WIP (Work In Process) is stored in the Fab for a complete cycle to run due to different Process time.
   This allows each process equipment to achieve maximum efficiency (maximum production capacity).
   The 300mm Stocker System for WIP storage has the function of storing and downloading functions of operator and WIP through the interface function through OHT and auto in-out port and manual port.
   Recently, according to the expansion to 300mm One Fab Solution the WIP storage function has been distributed as STB(Side Track Buffer) and UTB(Under Track Buffer). According to the development of ultrafine process technology, N2 purge function is applied to prevent contamination of wafer in FOUP. Complying the standards of Cleanroom Standard (FED-209E) and SEMI E88 (Stocker SEM).

Features and Benefits

Compact Footprint
Available in configurations up to 4.2 x 5m module.
Minimized dead space and full use of vertical space.

High Cycle time
High speed robot move with 12second average cycle time(4.2m x 5mH standard module, 120cell base)

Standards
Compliance with current SEMI standards ensures interoperation with other cleanroom equipment.

Automatic teaching & alignment
When installing the Stocker system is very short and easy.
Crane robot has the auto teaching function.
When the Crane robot stores FOUP in shelf, Crane robot has self-alignment function.

Communication
SECS / HSMS / GEM compatible